JPH054275Y2 - - Google Patents

Info

Publication number
JPH054275Y2
JPH054275Y2 JP1984082636U JP8263684U JPH054275Y2 JP H054275 Y2 JPH054275 Y2 JP H054275Y2 JP 1984082636 U JP1984082636 U JP 1984082636U JP 8263684 U JP8263684 U JP 8263684U JP H054275 Y2 JPH054275 Y2 JP H054275Y2
Authority
JP
Japan
Prior art keywords
plate
turntable
top ring
wafer
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1984082636U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60194457U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984082636U priority Critical patent/JPS60194457U/ja
Publication of JPS60194457U publication Critical patent/JPS60194457U/ja
Application granted granted Critical
Publication of JPH054275Y2 publication Critical patent/JPH054275Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
JP1984082636U 1984-06-04 1984-06-04 ウエハ−研摩装置 Granted JPS60194457U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984082636U JPS60194457U (ja) 1984-06-04 1984-06-04 ウエハ−研摩装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984082636U JPS60194457U (ja) 1984-06-04 1984-06-04 ウエハ−研摩装置

Publications (2)

Publication Number Publication Date
JPS60194457U JPS60194457U (ja) 1985-12-25
JPH054275Y2 true JPH054275Y2 (en]) 1993-02-02

Family

ID=30630529

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984082636U Granted JPS60194457U (ja) 1984-06-04 1984-06-04 ウエハ−研摩装置

Country Status (1)

Country Link
JP (1) JPS60194457U (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7109879A (en]) * 1971-07-16 1973-01-18
JPS596545A (ja) * 1982-07-05 1984-01-13 Hitachi Ltd ウエハ乾燥装置

Also Published As

Publication number Publication date
JPS60194457U (ja) 1985-12-25

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